Optimization of sensitivity of MEMS micro-pressure sensor
نویسندگان
چکیده
منابع مشابه
Modeling of capacitance and sensitivity of a MEMS pressure sensor
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ژورنال
عنوان ژورنال: Guangxue jingmi gongcheng
سال: 2022
ISSN: ['1004-924X']
DOI: https://doi.org/10.37188/ope.20223013.1582